发明名称 Method for manufacturing a semiconductor device by forming portions thereof at the same time
摘要 A device and a method for manufacturing the same in which with device includes a single crystal semiconductor substrate and an SOI substrate separated from the single crystal semiconductor substrate by a thin buried insulating film and having a thin single crystal semiconductor thin film (SOI layer) in which well diffusion layer regions, drain regions, gate insulating films, and gate electrodes of the SOI-type MISFET and the bulk-type MISFET are formed in the same steps. The bulk-type MISFET and the SOI-type MISFET are formed on the same substrate, so that board area is reduced and a simple process can be realized by making manufacturing steps of the SOI-type MISFET and the bulk-type MISFET common.
申请公布号 US8409936(B2) 申请公布日期 2013.04.02
申请号 US201213363268 申请日期 2012.01.31
申请人 TSUCHIYA RYUTA;KIMURA SHINICHIRO;RENESAS ELECTRONICS CORPORATION 发明人 TSUCHIYA RYUTA;KIMURA SHINICHIRO
分类号 H01L21/84 主分类号 H01L21/84
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