发明名称 |
Method and apparatus for curing thin films on low-temperature substrates at high speeds |
摘要 |
A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information. |
申请公布号 |
US8410712(B2) |
申请公布日期 |
2013.04.02 |
申请号 |
US20080253399 |
申请日期 |
2008.10.17 |
申请人 |
SCHRODER KURT A.;MARTIN KARL M.;JACKSON DOUG K.;MCCOOL STEVEN C.;NCC NANO, LLC |
发明人 |
SCHRODER KURT A.;MARTIN KARL M.;JACKSON DOUG K.;MCCOOL STEVEN C. |
分类号 |
H05B41/14 |
主分类号 |
H05B41/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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