WAFER PROCESSING APPARATUS

摘要

PURPOSE: A wafer processing apparatus is provided to loosen a fixing bolt for combining a rotation shaft of a motor with a pulley. CONSTITUTION: A main body(110) includes a port(112). An opening(114) is formed in the rear surface of the main body. A stage(120) reciprocates on the lower side of the main body. A FOUP(51) having a wafer(55) is mounted on the stage. A door is detachably combined with a cover(51a).