| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect a sound wave generated at an inspection object. <P>SOLUTION: A longitudinal wave is irradiated in liquid when an input electric signal is applied. The longitudinal wave is reflected by a diaphragm 4 and detected as a delay electric signal. On the other hand, a connection signal generated by applying the input electric signal is also detected. At this time, if an impact is applied to the inspection object, a sound wave generated in consequence is propagated to the diaphragm 4 through a vibration propagating body 5, and the diaphragm 4 vibrates to vary a clearance between the diaphragm 4 and a counter electrode 3. As a result, an interference signal of the delay electric signal and connection signal is generated. The sound wave generated at the inspection object can thus be detected as the interference signal. <P>COPYRIGHT: (C)2013,JPO&INPIT |
