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发明名称
ALUMINUM NITRIDE SUBSTRATE UNIT
摘要
申请公布号
JPH06196601(A)
申请公布日期
1994.07.15
申请号
JP19920344216
申请日期
1992.12.24
申请人
TOSHIBA CORP
发明人
SATO HIDEKI
分类号
H01L23/12;H01L23/373;(IPC1-7):H01L23/373
主分类号
H01L23/12
代理机构
代理人
主权项
地址
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