发明名称 |
REGENERATED COOLANT AND COOLANT REGENERATION METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a regenerated coolant and a coolant regeneration method in which the ratio of silicon particulates with a particle size of 0.1 μm or smaller is reduced. <P>SOLUTION: The coolant regeneration method 1a includes: a coolant supply step S1 of supplying a used coolant 3 to a centrifugation unit 2; a centrifugation step S2 of centrifuging the used coolant 3; a centrifugation liquid recovery step S3 of recovering a centrifugation liquid 19 which is separated; a centrifugation liquid supply step S5 of supplying the centrifugation liquid 5 to a membrane separation unit 7; a membrane separation step S6 of membrane-separating the centrifugation liquid 19; and a membrane filtrate recovery step S7 of recovering a membrane filtrate 21 which is separated. The regenerated coolant 4 has a residual silicon component of 0.01 wt.% or larger and 3.0 wt.% or smaller relative to the whole regenerated coolant, and silicon particulates with a particle size of 0.1 μm or smaller which are contained in the residual silicon component is 0.01 wt.% or larger and 30 wt.% or smaller relative to the whole residual silicon component. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013056380(A) |
申请公布日期 |
2013.03.28 |
申请号 |
JP20110194821 |
申请日期 |
2011.09.07 |
申请人 |
G-FORCE JAPAN KK;KURARAY CO LTD |
发明人 |
BONO SHIGEKI;NISHIDA KOJI;OGITA DAI;YAMADA KOJI;NISHI TAKEO |
分类号 |
B24B57/00;B28D7/02;H01L21/304 |
主分类号 |
B24B57/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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