| 摘要 |
The present invention provides a new ion source. Compared with the previous ion source, the new ion source has the same function with the previous ion source although having few number of electrodes. The ion source (1) of the present invention does not have a suppression electrode used for suppressing electrons to inflow from a downstream side (Z-direction side). The ion source (1) comprises: a plurality of electrodes (5, 6, 7) which are arranged along a lead-out direction of an ion beam (3); and magnetic field generation component (11) which is arranged at the downstream side (Z-direction side) of the electrodes (5, 6, 7) and at least has a pair of magnetic poles (20, 21), wherein the pair of magnetic poles (20, 21) generate a magnetic field across the ion beam (3) leaded out from the ion source (1). |
