摘要 |
<P>PROBLEM TO BE SOLVED: To smooth a processing surface when laser-processing a workpiece by vibrating an irradiation position of laser with an amplitude along an irradiation direction of laser. <P>SOLUTION: A laser processing head 1 has a fiber connector 10 to which laser is guided through an optical fiber cable. The head includes a collimate lens 26 which makes a laser emitted in a dispersed state by the fiber connector 10 into parallel light, and a focusing lens 41 which collects a light passed through the collimate lens 26. The workpiece is irradiated with the light collected by the focusing lens 41 to form an image. The collimate lens 26 is set in a collimate lens case 12 movable in the irradiation direction of the laser within the laser processing head 1. The collimate lens case 12 is connected to an ultrasonic vibrating body 51 vibrating along the irradiation direction of the laser. The focal position of the laser is vibrated with an amplitude along the optical axis direction of laser by the vibration of the collimate lens 26. <P>COPYRIGHT: (C)2013,JPO&INPIT |