| 摘要 |
The invention provides a method for evaluating multi-gray scale photomas, including: for the transfer patterns of the multi-gray scale photomas, obtaining a spatial image data under the condition of an exposure, and for the spatial image data, determining the predeterminned threshold value of the effect transmissivity. Then, The spatial image data is binarized by using the threshold value, and the transfer patterns are evaluated by using the binarized spatial image data. |
