发明名称 |
Method of manufacturing vane |
摘要 |
A method is provided which manufactures a vane used for an oil-sealed rotary vacuum pump and having at least a part formed of a resin material, the method including: an oil impregnating process of immersing the vane into oil used for the oil-sealed rotary vacuum pump under a depressurized condition, the oil impregnating process being carried out before a finishing process of finishing the vane into a final shape. |
申请公布号 |
US8402651(B2) |
申请公布日期 |
2013.03.26 |
申请号 |
US20090369803 |
申请日期 |
2009.02.12 |
申请人 |
TANAKA TOMONARI;YAHAGI MITSURU;SHIBAYAMA KOUJI;NAKAMURA TAKASHI;FUKAURA YUUJI;ULVAC, INC. |
发明人 |
TANAKA TOMONARI;YAHAGI MITSURU;SHIBAYAMA KOUJI;NAKAMURA TAKASHI;FUKAURA YUUJI |
分类号 |
B21K3/04;B05D3/00 |
主分类号 |
B21K3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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