发明名称 Transferred thin film transistor and method for manufacturing the same
摘要 Provided are a transferred thin film transistor and a method of manufacturing the same. The method includes: forming a source region and a drain region that extend in a first direction in a first substrate and a channel region between the source region and the drain region; forming trenches that extend in a second direction in the first substrate to define an active layer between the trenches, the second direction intersecting the first direction; separating the active layer between the trenches from the first substrate by performing an anisotropic etching process on the first substrate inside the trenches; attaching the active layer on a second substrate; and forming a gate electrode in the first direction on the channel region of the active layer.
申请公布号 US8404532(B2) 申请公布日期 2013.03.26
申请号 US20100782303 申请日期 2010.05.18
申请人 KOO JAE BON;AHN JONG-HYUN;KANG SEUNG YOUL;MUSARRAT HASAN;YOU IN-KYU;CHO KYOUNG IK;ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 KOO JAE BON;AHN JONG-HYUN;KANG SEUNG YOUL;MUSARRAT HASAN;YOU IN-KYU;CHO KYOUNG IK
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
主权项
地址