STACKED PIEZOELECTRIC THIN FILM STRUCTURE FOR EVALUATING RESIDUAL STRAIN

摘要

PURPOSE: A stacked piezoelectric thin film structure for measuring residual stress is provided to efficiently measure residual strain according to the residual stress of the stacked piezoelectric thin film. CONSTITUTION: A stacked piezoelectric thin film structure for measuring residual stress comprises a mirror reflecting face(402) and one or more beams(403). The mirror reflecting face is formed at the center of a substrate. The beams are formed from the lateral sides of the mirror reflecting face to the edge of the substrate and have predetermined width and length.