| 摘要 |
<p>PURPOSE: A laser processing device is provided to form a plurality of degraded layers in a thickness direction in a preset processing area on a workpiece and to efficiently laminating reformed layers. CONSTITUTION: A laser processing device comprises a laser irradiating member(6), a process-transferring member(37), an X-axis direction position detecting member, and a control member. The laser irradiating member includes a condenser(64) and a piezo motor(65). The piezo motor displaces the condenser at a set angle of an Z-axis optical shaft of a condensing lens. The control member controls frequencies of high frequency current and voltage applying to the piezo motor.</p> |
