发明名称 |
DIE BONDER AND DIE BONDING METHOD |
摘要 |
PURPOSE: A die bonder and a die bonding method are provided to reduce the number of handling and improve yield. CONSTITUTION: A die supply stage(2) supports a wafer. A first head includes a first collet(5) for temporarily attaching a die on an attach stage(4). A second head includes a second collet(55) for temporarily pressing the die on an attach stage. |
申请公布号 |
KR20130029708(A) |
申请公布日期 |
2013.03.25 |
申请号 |
KR20120024283 |
申请日期 |
2012.03.09 |
申请人 |
HITACHI HIGH-TECH INSTRUMENT CO., LTD. |
发明人 |
MAKI HIROSHI;MOCHIZUKI MASAYUKI;TANI YUKIO;MOCHIZUKI TAKEHITO |
分类号 |
H01L21/58 |
主分类号 |
H01L21/58 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|