发明名称 DIE BONDER AND DIE BONDING METHOD
摘要 PURPOSE: A die bonder and a die bonding method are provided to reduce the number of handling and improve yield. CONSTITUTION: A die supply stage(2) supports a wafer. A first head includes a first collet(5) for temporarily attaching a die on an attach stage(4). A second head includes a second collet(55) for temporarily pressing the die on an attach stage.
申请公布号 KR20130029708(A) 申请公布日期 2013.03.25
申请号 KR20120024283 申请日期 2012.03.09
申请人 HITACHI HIGH-TECH INSTRUMENT CO., LTD. 发明人 MAKI HIROSHI;MOCHIZUKI MASAYUKI;TANI YUKIO;MOCHIZUKI TAKEHITO
分类号 H01L21/58 主分类号 H01L21/58
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