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发明名称
矽单结晶晶圆及其制造方法
摘要
本发明之课题系提供对薄膜装置有效地发挥去疵(gettering)效果的矽单结晶晶圆的制造方法。本发明之解决手段系由以柴式长晶法(Czochralski method)育成之单结晶所加工之矽晶圆,对初期格子间氧浓度为1.4×1018个原子/cc(ASTM F-121,1979)以上之晶圆,施行10秒以下的急速升降温热处理。
申请公布号
TWI390091
申请公布日期
2013.03.21
申请号
TW097117827
申请日期
2008.05.15
申请人
胜高股份有限公司 日本
发明人
小野敏昭;木原誉之
分类号
C30B33/02;C30B29/06;H01L21/322
主分类号
C30B33/02
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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