| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS resonator in which variation in resonance frequency is reduced without increasing the size and cost of the device. <P>SOLUTION: A MEMS resonator 200 includes: a beam-like vibrator 101 which mechanically vibrates when electrostatic force is applied to it; a support for vibratably supporting the vibrator 101; and at least one electrode 102 having a surface opposite to the vibrator 101 via an air gap 103. The MEMS resonator 200 outputs a current, generated by vibration of the vibrator 101, through an output terminal connected to the vibrator 101 or the at least one electrode 102. The vibrator vibrates in a torsional resonance mode centered on a longitudinal axis of the beam. The surfaces of the vibrator 101 and the electrode 102, which are facing each other, are composed of different conductivity types of semiconductors. In the vibrator 101, a surface portion 111, which includes the surface facing the electrode 102, is doped with an impurity whose concentration is higher than that in other portions. <P>COPYRIGHT: (C)2013,JPO&INPIT |
