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发明名称
摘要
申请公布号
JP5167675(B2)
申请公布日期
2013.03.21
申请号
JP20070101665
申请日期
2007.04.09
申请人
发明人
分类号
H01L21/82;H01L21/3205;H01L21/768;H01L21/822;H01L23/532;H01L27/04
主分类号
H01L21/82
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