| 发明名称 |
EMITTER, GAS FIELD IONIZATION ION SOURCE, AND ION BEAM DEVICE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ion source emitter minute in variation of extraction voltages even after regeneration processing at an apex section has been repeatedly performed. <P>SOLUTION: In an emitter according to the present invention, a tip has a triangular pyramid shape including an apex of a monoatom, and a shape of the tip viewed from the apex side is substantially hexagonal. <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2013054911(A) |
申请公布日期 |
2013.03.21 |
| 申请号 |
JP20110192272 |
申请日期 |
2011.09.05 |
| 申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
KAWANAMI YOSHIMI;MORIYA HIRONORI;MUTO HIROYUKI |
| 分类号 |
H01J27/26;H01J37/08;H01J37/317 |
主分类号 |
H01J27/26 |
| 代理机构 |
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| 主权项 |
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