| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray analyzer capable of suppressing influence due to variation of performance characteristics of a preamplifier prestage. <P>SOLUTION: The X-ray analyzer comprises: a preamplifier prestage including a semiconductor X-ray detection element for detecting a fluorescent X-ray emitted from a standard sample and a first-stage FET circuit for receiving an output signal of the semiconductor X-ray detection element; a cooler for cooling the preamplifier prestage; a signal analyzer for analyzing a detection signal outputted from the preamplifier prestage; and a controller for monitoring a performance value showing performance characteristics of the preamplifier prestage obtained by analyzing the detection signal, and a temperature of the preamplifier prestage in a real time, controlling the cooler to adjust the temperature of the preamplifier prestage so that the performance value satisfies a specified value. The preamplifier prestage analyzes a fluorescent X ray emitted from a measuring object at the adjusted temperature. <P>COPYRIGHT: (C)2013,JPO&INPIT |
