发明名称 METHOD FOR PRODUCING SEMICONDUCTOR ELEMENT SUBSTRATE
摘要 Disclosed is a method for producing a semiconductor element substrate, which involves: a step for subjecting the semiconductor element surface or the semiconductor layer element surface contained in the aforementioned semiconductor element to plasma processing; and a step for forming a passivation film formed from an organic material on the semiconductor element surface or the semiconductor element layer surface which were subjected to plasma processing.
申请公布号 KR20130029040(A) 申请公布日期 2013.03.21
申请号 KR20127013813 申请日期 2011.03.01
申请人 ZEON CORPORATION 发明人 TANABE AKIHIRO
分类号 H01L21/312;H01L21/336;H01L29/786 主分类号 H01L21/312
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