| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrator that can obtain a more satisfactory vibration mode and causes a small amount of characteristic variation caused by a temperature change. <P>SOLUTION: A tuning fork type vibrator 1 has an odd number of three or more elastic arms 11 (12, 13) and a base 14 connected to each one end of the elastic arms, and vibrates the elastic arms in the front and rear directions while the adjacent elastic arms are staggered. The elastic arms include a base material 18 and a piezoelectric element 15 that is provided at one surface of the base material 18 and comprises a lower electrode film 15a, a piezoelectric film 15b, and an upper electrode film 15c. When the length of the base material 18 of the elastic arm 11 extending from the base 14 is set to A, the length from the base 14 on the base material 18 of the piezoelectric film 15b is set to B, and the length from the base 14 on the base material 18 in an electric field region formed by opposing the lower electrode film 15a to the upper electrode film 15c is set to C, (3/4)A≤B≤A and (1/4)A≤C≤(1/2)A are both satisfied. <P>COPYRIGHT: (C)2010,JPO&INPIT |
