| 摘要 |
Disclosed herein is an inertial sensor including: a sensor part including a driving body displaceably mounted on a flexible substrate part, a driving unit moving the driving body, and a displacement detection unit detecting a displacement of the driving body, wherein the inertial sensor includes an application specific integrated circuit (ASIC) including the sensor part coupled thereto; a printed circuit board including the ASIC coupled thereto and electrically connected to the sensor part and the ASIC by a wire; and a cap covering the sensor part and the ASIC and coupled to the printed circuit board, whereby the driving body and the flexing substrate part is protected and an interval between the driving body and the flexible substrate part is optimized to obtain efficient driving characteristics and a Q factor and improve a freedom of design in a space use. |
