| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a force sensor in which a piezoelectric element is easily formed from a wafer without any waste, and its sensitivity values in an x-direction and y-direction are not different. <P>SOLUTION: An outer peripheral shape of the piezoelectric element has at least four sides. A first side and a second side among the four sides are parallel to each other, and the remaining third side and fourth side are also parallel to each other. The distance between the first side and the second side and the distance between the third side and the fourth side are the same. An extension line of the first side and an extension line of the third line are orthogonal. Thus, pieces cut out from the same wafer can be commonly used as both of piezoelectric elements for x-direction and piezoelectric elements for y-direction. Consequently sensitivity values in the x-direction and y-direction are matched. <P>COPYRIGHT: (C)2013,JPO&INPIT |
