THERMAL EVAPORATOR AND NOZZLE APPARATUS THEREOF

摘要

PURPOSE: A thermal evaporator and a nozzle apparatus thereof are provided to prevent the generation of particles by controlling the temperature of a nozzle. CONSTITUTION: An external boat(10) is combined with a deposition chamber. An internal boat(20) provides a space for accommodating the deposition source. A nozzle(100) includes a pair of heating units. Thermo couplers(22,24,26) sense the temperature of the nozzle. A nozzle guide(104) fixes the nozzle to a cover(21) of the inner boat.