发明名称 |
System and method for pedestal adjustment |
摘要 |
A pedestal positioning assembly system for use in a substrate processing system includes a pedestal rigidly attached to a pedestal shaft, a reference rigidly attached to the substrate processing system, a lateral adjustment assembly to adjust a lateral location of the pedestal relative to the reference, and a vertical adjustment assembly to adjust a tilt of the pedestal relative to the reference. The lateral adjustment assembly and the vertical adjustment assembly are external to a processing chamber and are coupled to the pedestal disposed within the processing chamber through the pedestal shaft. The reference can be a ring and the lateral adjustment assembly substantially centers the pedestal within the ring. A method of adjusting a pedestal includes leveling the pedestal, translating the pedestal, calibrating the pedestal height to a preheat ring level, and checking the level and location of the pedestal while rotating the pedestal.
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申请公布号 |
US8398777(B2) |
申请公布日期 |
2013.03.19 |
申请号 |
US20080238921 |
申请日期 |
2008.09.26 |
申请人 |
COLLINS RICHARD O.;PATALAY KAILASH KIRAN;VATUS JEAN R.;CONG ZHEPENG;APPLIED MATERIALS, INC. |
发明人 |
COLLINS RICHARD O.;PATALAY KAILASH KIRAN;VATUS JEAN R.;CONG ZHEPENG |
分类号 |
C23C16/00;C23C16/50;C23F1/00;H01L21/306 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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