摘要 |
PURPOSE: A thermal evaporation device is provided to improve the utilization efficiency of an expensive evaporation material by installing a metal heater of a plate shape and to enable the evaporation material to evaporate on a base to be uniform and reproducible. CONSTITUTION: A thermal evaporation device comprises a supporting material, a heater, and a jig for mounting a base. The heater heats the supporting material containing evaporation materials. The jig is formed to be movable in the front side and around the supporting material. The heater is a metal heater of a plate shape which is installed in a revolution shaft of the base to be in parallel, and the supporting material is arranged on the front side of the metal heater. [Reference numerals] (AA) Plate-shaped metal heater; (BB) Carrier; (CC) Carrier support
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