发明名称 THERMAL EVAPORATOR
摘要 PURPOSE: A thermal evaporation device is provided to improve the utilization efficiency of an expensive evaporation material by installing a metal heater of a plate shape and to enable the evaporation material to evaporate on a base to be uniform and reproducible. CONSTITUTION: A thermal evaporation device comprises a supporting material, a heater, and a jig for mounting a base. The heater heats the supporting material containing evaporation materials. The jig is formed to be movable in the front side and around the supporting material. The heater is a metal heater of a plate shape which is installed in a revolution shaft of the base to be in parallel, and the supporting material is arranged on the front side of the metal heater. [Reference numerals] (AA) Plate-shaped metal heater; (BB) Carrier; (CC) Carrier support
申请公布号 KR20130028410(A) 申请公布日期 2013.03.19
申请号 KR20110091937 申请日期 2011.09.09
申请人 MMT CO., LTD. 发明人 KIM, YOUN TEAG;LIM, CHO SUP
分类号 C23C14/24;C23C14/06 主分类号 C23C14/24
代理机构 代理人
主权项
地址