LASER TRIMMING METHOD

摘要

PURPOSE: A laser trimming method is provided to improve a trimming speed by removing a process of measuring the change of a resistance in one part of the resistant element in a laser trimming process. CONSTITUTION: A preset part of a resistant element is firstly trimmed(S101). A resistance changed by a first trimming process is measured(S103). A relation between the resistance and the preset part is analyzed(S105). A second trimming process is performed by using an analysis result until a resistance is within a preset range of the final target resistance(S107). The resistance of the remaining resistant element is measured in real time. A third trimming process is performed until the resistance measured in a real time becomes the final target resistance(S109). [Reference numerals] (AA) Start; (BB) End; (S101) Firstly trimming a part(S1) of a resistant element; (S103) Measuring a resistance(R1) changed by the first trimming process; (S105) Analyzing a relation between the resistance(R1) and the part(S1); (S107) Performing a second trimming process by using an analysis result until the resistance becomes a resistance(R2) within a preset range of the final target resistance(R_T); (S109) Measuring the resistance of a remaining resistant element after the second trimming process in real time and performing a third trimming process until the resistance measured in real time becomes the final target resistance