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发明名称
摘要
申请公布号	DE1489135(A1)	申请公布日期	1970.06.04
申请号	DE19641489135	申请日期	1964.01.17
申请人		发明人
分类号	C30B31/22;H01J37/317;H01L21/00;H01L21/265	主分类号	C30B31/22
代理机构		代理人
主权项
地址

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