| 发明名称 |
CLEANING MEMBER |
| 摘要 |
<p>PURPOSE: A cleaning member is provided to efficiently discharge the chemical removed from a nozzle. CONSTITUTION: A cleaning member(470) is installed in a groove port and includes a plate(472) and a bracket(478). The upper side of the plate is contacted with the remaining chemical in a discharge hole of the nozzle and removes the remaining chemical. A groove(474) is extended from the upper side to the lower side of the plate in a longitudinal direction. The grooves are separated in a width direction of the plate. The bracket is screwed to the plate and supports the plate.</p> |
| 申请公布号 |
KR20130027168(A) |
申请公布日期 |
2013.03.15 |
| 申请号 |
KR20110090579 |
申请日期 |
2011.09.07 |
| 申请人 |
SEMES CO., LTD. |
发明人 |
AHN, HEE MAN;CHOI, JIN HO |
| 分类号 |
H01L21/027;H01L21/02;H01L21/302 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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