发明名称 A METHOD OF MANUFACTURING SUBSTRATE FOR SURFACE-ENHANCED RAMAN SCATTERING SPECTROSCOPE AND THE SUBSTRATE MANUFACTURED BY THE METHOD
摘要 PURPOSE: A method for manufacturing a substrate for a surface enhanced raman scattering spectroscope and the substrate manufactured by the same are provided to obtain high repeatability and reduce manufacturing costs as nano patterns formed in a master substrate can be transferred to a polymer substrate repetitively. CONSTITUTION: A method for manufacturing a substrate for a surface enhanced raman scattering spectroscope is as follows. Polymer substances are spread on a master substrate where nano patterns are formed(S11). The polymer substances spread on the master substrate are solified(S12). The polymer substances are separated from the master substrate so that a polymer substrate with the nano patterns transferred from the master substrate is formed(S13). A metallic thin film is formed on the nano patterns of the polymer substrate(S14). Nano particles are spread on the nano patterns of the polymer substrate(S15). [Reference numerals] (AA) Start; (BB) End; (S11) Step of spreading polymer substances; (S12) Step of hardening the polymer substances; (S13) Step of forming a polymer substrate; (S14) Step of forming a metallic thin film; (S15) Step of spreading metallic nano particles
申请公布号 KR101243634(B1) 申请公布日期 2013.03.15
申请号 KR20110064227 申请日期 2011.06.30
申请人 发明人
分类号 G01J3/44;G01N21/65 主分类号 G01J3/44
代理机构 代理人
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