发明名称 |
CARRIER HEAD WITH COMPOSITE PLASTIC PORTIONS |
摘要 |
A chemical mechanical polishing head includes a base assembly that includes at least one component formed of a composite plastic having a tensile modulus approximately equal to or greater than aluminum, a retaining ring secured to the base assembly, and a flexible membrane secured to the base assembly to form a pressurizable chamber between the base assembly and an upper surface of the flexible membrane. A lower surface of the flexible membrane providing a substrate mounting surface. |
申请公布号 |
US2013065495(A1) |
申请公布日期 |
2013.03.14 |
申请号 |
US201213560636 |
申请日期 |
2012.07.27 |
申请人 |
GAJENDRA MANOJ A.;GIRIYAPURA KIRAN |
发明人 |
GAJENDRA MANOJ A.;GIRIYAPURA KIRAN |
分类号 |
B24B37/32;B24B37/00 |
主分类号 |
B24B37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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