| 发明名称 |
PLASMA PROCESSING OF WORKPIECES TO FORM A COATING |
| 摘要 |
A surface of an insulating workpiece is implanted to form either hydrophobic or hydrophilic implanted regions. A conductive coating is deposited on the workpiece. The coating may be a polymer in one instance. This coating preferentially forms either on the implanted regions if these implanted regions are hydrophilic or on the non-implanted regions if the implanted regions are hydrophobic.
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| 申请公布号 |
US2013064989(A1) |
申请公布日期 |
2013.03.14 |
| 申请号 |
US201213608709 |
申请日期 |
2012.09.10 |
| 申请人 |
HATEM CHRISTOPHER R.;GODET LUDOVIC;STEEN LOUIS;RAMAPPA DEEPAK A.;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
HATEM CHRISTOPHER R.;GODET LUDOVIC;STEEN LOUIS;RAMAPPA DEEPAK A. |
| 分类号 |
C23C14/48 |
主分类号 |
C23C14/48 |
| 代理机构 |
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| 主权项 |
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