发明名称 METHOD FOR FORMING PHOTOCATALYST APATITE FILM
摘要 <p>A method for forming a photocatalytic apatite includes a target production step (S12) for producing a sputtering target that contains photocatalytic apatite, and a sputtering step (S13) for forming a photocatalytic apatite film on a substrate by sputtering using the target. A firing step (S11) for firing the photocatalytic apatite is conducted before the sputtering step so as to increase the crystallinity of the photocatalytic apatite.</p>
申请公布号 EP1577009(B1) 申请公布日期 2013.07.10
申请号 EP20020790944 申请日期 2002.12.27
申请人 FUJITSU LIMITED 发明人 ASO, NORIYASU;WAKAMURA, MASATO
分类号 B01J27/00;B01J21/06;B01J21/16;B01J27/18;B01J35/00;B01J35/02;B01J37/00;B01J37/02;B01J37/34 主分类号 B01J27/00
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