IN-LINE TYPE CURING APPARATUS

摘要

PURPOSE: An inline type curing apparatus is provided to minimize damage to an individual substrate by precisely controlling a lifting process of a magazine. CONSTITUTION: A cure chamber(1) includes at least one magazine and a lifting unit(14) which lifts the magazine. A check door(15) opens or closes the cure chamber for maintenance and repair in the cure chamber. An opening and closing unit is arranged in an inlet and an outlet of the cure chamber and opens or closes the inlet and the outlet. An inlet input unit(3) includes an inlet conveyor to move an object and an input unit to input the object to the cure chamber. An outlet output unit(4) includes an output unit to output the object from the cure chamber and an outlet conveyor to move the object outputted by the output unit.