METHOD OF MANUFACTURING AN INTERMEDIATE REFLECTOR LAYER

摘要

An intermediate reflector layer in a thin film tandem solar cell is manufactured in that there is deposited a layer by PEDVD in a process atmosphere which is fed by a gas mixture comprising H2, SiH4, a dopant gas and CO2. The flow ratio of H2 to SiH4 is selected to be between 100 and 400 and the CO2 to SiH4 flux ratio is selected as high as possible, thereby maintaining electric conductivity of the layer.