发明名称 TRANSMISSIVE-REFLECTIVE PHOTOCATHODE
摘要 <p>The present invention includes a transmissive- reflective photocathode including a membrane configured to absorb photons from an illumination source via a first surface of the membrane, the membrane further configured to emit photoelectrons in a reflection mode via the first surface, the membrane further configured to emit photoelectrons in a transmissive mode via a second surface, the first surface and the second surface being substantially parallel, and a membrane support structure configured to mechanically secure the membrane, the membrane support structure further configured to provide at least a first pathway between the first surface and free space and a second pathway between the second surface and free space.</p>
申请公布号 WO2013036576(A1) 申请公布日期 2013.03.14
申请号 WO2012US53870 申请日期 2012.09.06
申请人 KLA-TENCOR CORPORATION;MALEEV, IVAN 发明人 MALEEV, IVAN
分类号 H01J40/06 主分类号 H01J40/06
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