| 摘要 |
PURPOSE: A carbon nano tube electric component and a manufacturing method thereof are provided to produce an electric component of high efficiency by placing a metal oxide nano particle layer between metal electrodes. CONSTITUTION: A metal oxide nano particle layer(14) is formed on a carbon nano tube layer(13). The thickness of the metal oxide nano particle layer is 0.1nm to 1.0nm. The metal oxide nano particle layer is comprised of an aluminum oxide. A metal electrode(17) is formed on the metal oxide nano particle layer. A metal nano particle is evaporated on the carbon nano tube layer with a vapor deposition method. The carbon nano tube layer is comprised of a plurality of carbon nano tubes. |
