| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means by which a crystal substrate is produced at a low cost. <P>SOLUTION: The method includes growing a crystal film (30) on a crystal growth surface (21) of a ground substrate (20) held by a substrate holding tool (10) of a vapor deposition apparatus, and then producing a crystal substrate (35) having a diameter Φ nearly equal to any one of 2 in, 2.5 in, 3 in, 4 in, 5 in, 6 in, 50 mm, 75 mm, 100 mm, 125 mm, and 150 mm, from the crystal film (30). The substrate holding tool (10) is equipped with an opening part (12) for exposing a portion of the crystal growth surface (21) of the ground substrate (20), the opening part (12) includes a circular arc-shaped part (13) in its contour, and the circular arc-shaped part (13) has a diameter approximately equal to the diameter Φ. <P>COPYRIGHT: (C)2013,JPO&INPIT |
