发明名称
摘要 A transmissive fly's eye integrator is disclosed that includes a first array of lenses and a second array of lenses. The first array of lenses and second array of lenses together form a fly's eye integrator, and the first array of lenses and second array of lenses comprise lenses which have a diameter selected from the range of 5 μm-50 μm, and a radius of curvature selected from the range of 25 μm-2500 μm.
申请公布号 JP5162560(B2) 申请公布日期 2013.03.13
申请号 JP20090241925 申请日期 2009.10.21
申请人 发明人
分类号 H01L21/027;G02B3/00;G02B13/14;G02B19/00;G03F7/20 主分类号 H01L21/027
代理机构 代理人
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