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发明名称
Verfahren zum photographischen UEbertragen von Strukturen auf Halbleiterkoerper
摘要
申请公布号
DE1622302(A1)
申请公布日期
1970.10.29
申请号
DE19681622302
申请日期
1968.02.01
申请人
TELEFUNKEN PATENTVERWERTUNGSGESELLSCHAFT MBH
发明人
KLAUS HENNINGS,DIPL.-PHYS. DR.
分类号
G03D13/00;G03D15/00;G03F7/09;G03F7/095;H01L21/00;H01L23/29
主分类号
G03D13/00
代理机构
代理人
主权项
地址
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