发明名称 |
SENSE ELEMENT ASSEMBLY AND METHOD |
摘要 |
<p>Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptical annular-like electrode around the center electrode, a ground electrode and a method for fusing the layers together to optimize sensitivity.</p> |
申请公布号 |
EP2271904(A4) |
申请公布日期 |
2013.03.13 |
申请号 |
EP20090735586 |
申请日期 |
2009.03.10 |
申请人 |
CUSTOM SENSORS & TECHNOLOGIES, INC. |
发明人 |
CASEY, GARY, L.;NASSAR, MARCOS;NGUYEN, NHAN |
分类号 |
G01L9/00;H01G5/011;H01G5/18 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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