THIN LAYERS DEPOSITION APPARATUS

摘要

PURPOSE: A thin film deposition device is provided to save time and workforce according to replacement of shield and to improve work productivity. CONSTITUTION: A thin film deposition device comprises a chamber(100) which a substrate is arranged inside, a source(300) which supplies a deposition material to the substrate, a roll shield(400) which surrounds source in order to prevent the deposition material from depositing in the inner wall of the chamber, and a roll shield replacement unit which replaces the roll shield. The roll shield is installed between the source and the substrate and comprises a first roll shield(410), and a second roll shield(430). The roll shield replacement unit comprises a first roll shield replacement unit and a second roll shield replacement unit. The first roll shield replacement unit is separated from the substrate in the inner side of the chamber and comprises a plurality of first shafts(511) and a first driving part.