| 摘要 |
Provided are a substrate transferring apparatus where a substrate is horizontally transferred along two directions within a chamber, a substrate processing apparatus with the same, and a substrate processing method using the same. The substrate transferring apparatus includes a plurality of rollers configured to support and horizontally transfer a substrate, a plurality of roller driving units configured to provide a rotation force to the plurality of rollers, a roller elevation unit configured to vertically operate the plurality of rollers, and a plurality of shaft connection members connected between driving shafts of the plurality of rollers and driving shafts of the roller driving units to transmit the rotation force, the plurality of shaft connection members maintaining a connection state between the driving shafts of the plurality of rollers and the driving shafts of the roller driving units, which are disposed at heights different from each other by the roller elevation unit. |
