| 发明名称 |
Nano-structured gasket for cold weld hermetic MEMS package and method of manufacture |
| 摘要 |
A structure and method for cold weld compression bonding using a metallic nano-structured gasket is provided. This structure and method allows a hermetic package to be formed at lower pressures and temperatures than are possible using bulk or conventional thin-film gasket materials.
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| 申请公布号 |
US8394679(B2) |
申请公布日期 |
2013.03.12 |
| 申请号 |
US20100874212 |
申请日期 |
2010.09.01 |
| 申请人 |
EATON MARK F;POTTER CURTIS NATHAN;MINER ANDREW;STELLARRAY, INC. |
发明人 |
EATON MARK F;POTTER CURTIS NATHAN;MINER ANDREW |
| 分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
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