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发明名称
处理基板的装置及其方法
摘要
一种基板处理装置包括:一具有夹盘的基板支撑单元,用于装载基板;一开顶式底部腔室,围绕于夹盘周围;一顶部腔室,用于打开与关闭底部腔室的顶部,当顶部腔室与外界隔绝时,使基板乾燥;以及一直接注射喷嘴,装配于顶部腔室中,用于当底部腔室的顶部关闭时,将流体直接地注入至基板。使用此基板处理装置,能使提升整个基板的乾燥效率,阻绝外界污染物,以及抑制氧化层的生成。
申请公布号
TWI389186
申请公布日期
2013.03.11
申请号
TW096122325
申请日期
2007.06.21
申请人
细美事有限公司 南韩
发明人
金贤锺;具教旭;赵重根
分类号
H01L21/30
主分类号
H01L21/30
代理机构
代理人
詹铭文 台北市中正区罗斯福路2段100号7楼之1;萧锡清 台北市中正区罗斯福路2段100号7楼之1
主权项
地址
南韩
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