| 摘要 |
PURPOSE: A cold trap and an evacuating apparatus using the same are provided to rapidly restore the degree of vacuum in an evacuation target space. CONSTITUTION: A cold trap(210) includes a cooling unit(222) and a cold panel(220). The cold panel is thermally connected to the cooling unit to be cooled. A rough surface is formed on the cold panel by matt plating the substrate of the cold panel or roughening the surface of the cold panel. The rough surface is formed on the side of the cold panel which faces an evacuation target space. [Reference numerals] (224) Controlling part |
