| 摘要 |
PURPOSE: A crucible device for thin film deposition and a thin film deposition apparatus including the same are provided to improve the reliability of thin film deposition by improving the uniformity of an organic thin film deposited on the substrate. CONSTITUTION: A crucible device for thin film deposition comprises a crucible(4C) storing an organic material and a plurality of organic material spray nozzles(4N) which are arranged in the crucible and individually moved by an actuating unit(43) to control the interval between them. Each actuating unit includes a slider(431) which is installed and moved in the crucible and has a nozzle hole(432) to connect an organic material spray nozzle. The crucible has an organic material vent(422) which is installed corresponding to each slider and aligned with the nozzle hole. |
