发明名称 Photoresist resin composition for column spacer
摘要 A photoresist resin composition for a column spacer is provided to ensure high glass transition temperature and improved adhesion and developability and to produce a pattern having excellent heat resistance and good film flatness, remaining rate, and pattern profile. A photoresist resin composition for a column spacer comprises (a) an alkali-soluble copolymer containing an unsaturated carboxylic acid ester compound obtained by reacting a C1-5 hydroxyalkyl unsaturated carboxylic acid ester compound with a lactone or cyclic acid anhydride having at least one alicyclic structure in the presence of a catalyst, (b) a polyfunctional acrylic monomer having at least two ethylenically unsaturated bonds, (c) a photopolymerization initiator, and (d) a solvent.
申请公布号 KR101241596(B1) 申请公布日期 2013.03.08
申请号 KR20060071339 申请日期 2006.07.28
申请人 发明人
分类号 G03F7/004;G03F7/028 主分类号 G03F7/004
代理机构 代理人
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