MATERIAL SUPPLYING APPARATUS AND THIN FILM DEPOSITING APPARATUS HAVING THE SAME

摘要

PURPOSE: A raw material supplying device and a thin film depositing device with the same are provided to supply two or more powdered materials using one raw material supplying device by preparing two or more containers. CONSTITUTION: A raw material supplying device comprises; two or more storing chambers(200a,200b) which store two or more powdered materials respectively; a horizontal channel(110) which is extended in one lateral direction and connected to two or more storing chambers; and a transferring shaft(300) which is inserted into the horizontal channel and includes two or more transferring holes. The transferring shaft is reciprocated inside the horizontal channel, thereby charging the powdered materials in two or more transferring holes or supplying the same to an external device.