| 发明名称 |
PASSIVE POSITION COMPENSATION OF A SPINDLE, STAGE, OR COMPONENT EXPOSED TO A HEAT LOAD |
| 摘要 |
Disclosed herein is an apparatus for providing passive correction for thermal effects on a mounted mechanical component. Further disclosed is a wafer inspection system employing the passive thermal effect correction apparatus. |
| 申请公布号 |
US2013057855(A1) |
申请公布日期 |
2013.03.07 |
| 申请号 |
US201113226492 |
申请日期 |
2011.09.06 |
| 申请人 |
DOYLE PAUL;BELYAEV ALEXANDER;KLA-TENCOR CORPORATION |
发明人 |
DOYLE PAUL;BELYAEV ALEXANDER |
| 分类号 |
G01N21/00;F16B1/00 |
主分类号 |
G01N21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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